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Proceedings Paper

Fault modeling of electrostatic comb-drives for MEMS
Author(s): Benoit Charlot; Spiridon Moussouris; Salvador Mir; Bernard Courtois
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Paper Abstract

The work described in this paper is aimed at fault modeling and fault simulation of electrostatic comb-drives. At present, we have taken into account the most typical defects which we have encountered through fabrication of resonator test structures. These defects include stiction of the suspended beams to the substrate surface and the break of comb-drive model, and the impact of a faulty comb-drive is assessed for different resonator-based designs.

Paper Details

Date Published: 10 March 1999
PDF: 8 pages
Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341226
Show Author Affiliations
Benoit Charlot, TIMA (France)
Spiridon Moussouris, TIMA (France)
Salvador Mir, TIMA (France)
Bernard Courtois, TIMA (France)

Published in SPIE Proceedings Vol. 3680:
Design, Test, and Microfabrication of MEMS and MOEMS
Bernard Courtois; Wolfgang Ehrfeld; Selden B. Crary; Wolfgang Ehrfeld; Hiroyuki Fujita; Jean Michel Karam; Karen W. Markus, Editor(s)

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