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Proceedings Paper

Testing philosophy behind the micro analysis system
Author(s): Hans G. Kerkhoff
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Paper Abstract

Microsystem testing has to cope with many problems, resulting from inaccessibility, different technologies and non-electrical failure modes. Possible test techniques have been investigated to test a new advanced microsystem. The implementation form and application area highly contributes to the choices made.

Paper Details

Date Published: 10 March 1999
PDF: 6 pages
Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341224
Show Author Affiliations
Hans G. Kerkhoff, Univ. of Twente (Netherlands)


Published in SPIE Proceedings Vol. 3680:
Design, Test, and Microfabrication of MEMS and MOEMS
Bernard Courtois; Wolfgang Ehrfeld; Selden B. Crary; Wolfgang Ehrfeld; Hiroyuki Fujita; Jean Michel Karam; Karen W. Markus, Editor(s)

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