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Proceedings Paper

Numeric investigation of vibrating microcantilever using Matlab/Simulink
Author(s): Arturas Ulcinas; Valentinas J. Snitka; Mindaugas Rackaitis
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Paper Abstract

Simple Matlab/Simulink model is presented allowing to simulate numerically the dynamics of surface coupled cantilever in wide frequency range. Contact interaction between surface and cantilever is estimated by nonlinear distance function. Simulations show that cantilever can retain the harmonic response to the sine excitation above its fundamental resonant frequency due to its small mass and spring constant and strong surface adhesion forces. The motion of the cantilever becomes chaotic at certain combinations of amplitude and frequency of excitation, as cantilever and surface lose contact. Frequency spectrum of cantilever deflection contains high frequency component corresponding to the nonlinear surface-cantilever contact spring and dependent on the surface material parameters.

Paper Details

Date Published: 10 March 1999
PDF: 4 pages
Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341222
Show Author Affiliations
Arturas Ulcinas, Kaunas Univ. of Technology (Lithuania)
Valentinas J. Snitka, Kaunas Univ. of Technology (Lithuania)
Mindaugas Rackaitis, Kaunas Univ. of Technology (Lithuania)

Published in SPIE Proceedings Vol. 3680:
Design, Test, and Microfabrication of MEMS and MOEMS
Bernard Courtois; Wolfgang Ehrfeld; Selden B. Crary; Wolfgang Ehrfeld; Hiroyuki Fujita; Jean Michel Karam; Karen W. Markus, Editor(s)

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