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Proceedings Paper

Computer-aided design tools for economical MEMS fabrication processes
Author(s): Christian Schneider; Andreas Priebe; Rainer Brueck; Kai Hahn
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Paper Abstract

Since the early 70s when microsystem technology was first introduce an enormous market for MST-products has been developed. Airbag sensors, micro pumps, ink jet nozzles etc. and the market is just about to start up. Establishing these products for a reasonable price requires mass production. Meanwhile, also computer-based design-tools have been developed in order to reduce the expenses for MST-design. In contrast to other physical design processes like e.g. in micro electronics, MEMS physical design is characterized by the fact that each product requires a tailored sequence of fabrication steps, usually selected from a variety of processing alternatives. The selection from these alternatives is based on economical constraints. Therefore, the design has a strong influence on the money and time spent to take an MST-product to market.

Paper Details

Date Published: 10 March 1999
PDF: 8 pages
Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341212
Show Author Affiliations
Christian Schneider, Univ.-Gesamthochschule Siegen (Germany)
Andreas Priebe, Univ.-Gesamthochschule Siegen (Germany)
Rainer Brueck, Univ.-Gesamthochschule Siegen (Germany)
Kai Hahn, Univ.-Gesamthochschule Siegen (Germany)

Published in SPIE Proceedings Vol. 3680:
Design, Test, and Microfabrication of MEMS and MOEMS
Bernard Courtois; Wolfgang Ehrfeld; Selden B. Crary; Wolfgang Ehrfeld; Hiroyuki Fujita; Jean Michel Karam; Karen W. Markus, Editor(s)

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