The use of MEMS technology has enabled the fabrication of micro-optical and micro-electro-mechanical systems on a common substrate. This has led to new challenges in computer aided design of optical micro-electro-mechanical systems. We have extended our opto-electronic system DAD tool, Chatoyant, to attempt to meet the needs to optical MEMS designers. This paper present new component models and analysis techniques which extend our tool to support optical MEMS design. We demonstrate these extensions with the analysis of a micro-optical high speed FT engine and a 1 by 2 optical MEM interferometer switch.

Date Published: 10 March 1999
PDF: 11 pages
Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341207

Published in SPIE Proceedings Vol. 3680:
Design, Test, and Microfabrication of MEMS and MOEMS
Bernard Courtois; Wolfgang Ehrfeld; Selden B. Crary; Wolfgang Ehrfeld; Hiroyuki Fujita; Jean Michel Karam; Karen W. Markus, Editor(s)