Proceedings Paper
Integrated CAD tools for top-down design of MEMS/MOEMS systems| Format | Member Price | Non-Member Price |
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Paper Abstract
Development of MEMS/MOEMS products is currently hampered by the need for design aids, which can assist in integration of all domains of the design. The cross-disciplinary character of MST requires a top-down approach to system design which, in turn, requires designers from many areas to work together in order to understand the effects of one sub-system on another. This paper describes current research on a methodology and tool-set which directly supports such an integrated design process.
Paper Details
Date Published: 10 March 1999
PDF: 8 pages
Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341200
Published in SPIE Proceedings Vol. 3680:
Design, Test, and Microfabrication of MEMS and MOEMS
Bernard Courtois; Wolfgang Ehrfeld; Selden B. Crary; Wolfgang Ehrfeld; Hiroyuki Fujita; Jean Michel Karam; Karen W. Markus, Editor(s)
PDF: 8 pages
Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341200
Show Author Affiliations
Bart F. Romanowicz, Microcosm Technologies, Inc. (United States)
Stephen F. Bart, Microcosm Technologies, Inc. (United States)
Stephen F. Bart, Microcosm Technologies, Inc. (United States)
John R. Gilbert, Microcosm Technologies, Inc. (United States)
Published in SPIE Proceedings Vol. 3680:
Design, Test, and Microfabrication of MEMS and MOEMS
Bernard Courtois; Wolfgang Ehrfeld; Selden B. Crary; Wolfgang Ehrfeld; Hiroyuki Fujita; Jean Michel Karam; Karen W. Markus, Editor(s)
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