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Proceedings Paper

Laser technologies in diffractive optics
Author(s): Voldemar Petrovich Koronkevich; Victor Pavlovich Korolkov; Alexander G. Poleshchuk
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Paper Abstract

Computer-generated holograms are limited by conventional lithographic fabrication capabilities, which rely on accurate deposition, exposure, and developing of photosensitive chemicals. We present alternate fabrication technologies, which use a focused laser beam to write submicron patterns by inducing changes in a metal or silicon film and LDW glass. Circular laser writing systems built at IA&E are described. This paper has reviewed some techniques and equipment for the fabrication of binary, multilevel and continuous-relief DOEs developed at IA&E.

Paper Details

Date Published: 28 January 1999
PDF: 11 pages
Proc. SPIE 3733, ICONO '98: Nonlinear Optical Phenomena and Coherent Optics in Information Technologies, (28 January 1999); doi: 10.1117/12.340090
Show Author Affiliations
Voldemar Petrovich Koronkevich, Institute of Automation and Electrometry (Russia)
Victor Pavlovich Korolkov, Institute of Automation and Electrometry (Russia)
Alexander G. Poleshchuk, Institute of Automation and Electrometry (Russia)


Published in SPIE Proceedings Vol. 3733:
ICONO '98: Nonlinear Optical Phenomena and Coherent Optics in Information Technologies
Sergei S. Chesnokov; Valerii P. Kandidov; Nikolai I. Koroteev, Editor(s)

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