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Proceedings Paper

Micromachined ultrasonic transducers for air-coupled nondestructive evaluation
Author(s): Sean T. Hansen; F. Levent Degertekin; Butrus T. Khuri-Yakub
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Paper Abstract

Conventional methods of ultrasonic non-destructive evaluation (NDE) use liquids to couple sound waves into the test samples. This either requires immersion of the parts to be examined or the use of complex and bulky water squirting systems that must be scanned over the structure. Air-coupled ultrasonic systems eliminate these requirements if the losses at air-solid interfaces are tolerable. Micromachined capacitive ultrasonic transducers (cMUTs) have been shown to have more than 100 dB dynamic range when used in the bistatic transmission mode. In this paper, we present results of a pitch-catch transmission system using cMUTs that achieves a 103 dB dynamic range. Each transducer consists of 10,000 silicon nitride membranes of 100 micrometers diameter connected in parallel. This geometry result in transducers with a resonant frequency around 2.3 MHz. These transducers can be used in transmission experiments at normal incident to the sample or to excite and detect guided waves in aluminum and composite plates. In this paper we present ultrasonic defect detection results from both through transmission and guided Lamb wave experiments in aluminum and composite plates, such as those used in aircraft.

Paper Details

Date Published: 28 January 1999
PDF: 9 pages
Proc. SPIE 3586, Nondestructive Evaluation of Aging Aircraft, Airports, and Aerospace Hardware III, (28 January 1999); doi: 10.1117/12.339900
Show Author Affiliations
Sean T. Hansen, Stanford Univ. (United States)
F. Levent Degertekin, Stanford Univ. (United States)
Butrus T. Khuri-Yakub, Stanford Univ. (United States)

Published in SPIE Proceedings Vol. 3586:
Nondestructive Evaluation of Aging Aircraft, Airports, and Aerospace Hardware III
Ajit K. Mal, Editor(s)

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