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Proceedings Paper

Group velocity delay spectroscopy technique for industrial monitoring of electron-beam-induced vapors
Author(s): Jerry J. Benterou; Leon Val Berzins; Manish N. Sharma
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Paper Abstract

Spectroscopic techniques are ideal for characterization and process control of electron beam generated beam generated vapor plumes. Absorption based techniques work well for a wide variety of applications, but are difficult to apply to optically dense or opaque vapor plumes. We describe an approach for monitoring optically dense vapor plumes that is based on measuring the group velocity delay of a laser beam near an optical transition to determine the vapor density. This technique has a larger dynamic range than absorption environment. Aluminum as chosen because of its prevalence in high performance aircraft alloys. In these applications, composition control of the alloy constituents is critical to the deposition process. Data is presented demonstrating the superior dynamic range of the measurement. In addition, preliminary data demonstrating aluminum vapor rate control in an electron beam evaporator is presented. Alternative applications where this technique could be useful are discussed.

Paper Details

Date Published: 22 January 1999
PDF: 10 pages
Proc. SPIE 3535, Advanced Sensors and Monitors for Process Industries and the Environment, (22 January 1999); doi: 10.1117/12.337473
Show Author Affiliations
Jerry J. Benterou, Lawrence Livermore National Lab. (United States)
Leon Val Berzins, Lawrence Livermore National Lab. (United States)
Manish N. Sharma, Lawrence Livermore National Lab. (United States)

Published in SPIE Proceedings Vol. 3535:
Advanced Sensors and Monitors for Process Industries and the Environment
Wim A. de Groot, Editor(s)

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