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Proceedings Paper

Reactive evaporation technology for fabrication of YBCO wafers for microwave applications
Author(s): Vladimir C. Matijasevic; Per Slycke
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Paper Abstract

We discuss technology issues in deposition of high temperature superconducting YBCO thin films by reactive evaporation. Several key components are necessary to make this a robust manufacturing process. The oxygen pocket heater is the most significant part and determines most of the repeatability and uniformity issues. Additionally, a reliable and repeatable measurement of the atomic beams is necessary for good control of the cation stoichiometry. Quartz crystal monitors (QCM) are currently used for rate control, although their current implementation limits them to rate control at the level of 5%. A tunable-diode laser sensor has been compared directly against a QCM and demonstrated to agree to 1% of the QCM flux measurements. Because of the ability of these new laser senors to measure the deposition flux in the sample position, they seem the most promising technology for vapor flux measurement and control.

Paper Details

Date Published: 22 December 1998
PDF: 7 pages
Proc. SPIE 3481, Superconducting and Related Oxides: Physics and Nanoengineering III, (22 December 1998); doi: 10.1117/12.335875
Show Author Affiliations
Vladimir C. Matijasevic, Conductus, Inc. (United States)
Per Slycke, Conductus, Inc. (United States)

Published in SPIE Proceedings Vol. 3481:
Superconducting and Related Oxides: Physics and Nanoengineering III
Davor Pavuna; Ivan Bozovic, Editor(s)

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