A fiber optic sensor for measuring the diameter and from errors of very small hole or blind hoe. with diameter down to 0.2 mm and depth to diameter ratio up to 20 was developed. Since optical non-contact methods are difficult to use for measuring the diameter and from errors of small hole at any cross section, a fiber optic sensor, which combines the advantages of optical non-contact method and mechanical contact one, was proposed. The principle is based on the evaluation of a central position of stylus ball by an optical system. Experiments show that the accuracy of the system is better than 1 micrometers and the measuring force is less than 10 (mu) N.

Date Published: 11 January 1999
PDF: 4 pages
Proc. SPIE 3538, Process Monitoring with Optical Fibers and Harsh Environment Sensors, (11 January 1999); doi: 10.1117/12.335740

Published in SPIE Proceedings Vol. 3538:
Process Monitoring with Optical Fibers and Harsh Environment Sensors
Michael A. Marcus; Michael A. Marcus; Anbo Wang, Editor(s)