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Proceedings Paper

Fundamentals of the advanced Fresnel tracer used for two-dimensional in-process micromeasurements
Author(s): Burkhard Huhnke; Gunnar Urbschat
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Paper Abstract

The drive to short development times and closed-loop process control has created a demand for new tools to collect the needed dimensional data. Optical technologies in fields such as sensors, signal processing, metrology, and instrumentation offer unique solutions to many areas of monitoring, diagnostics and control. The Advanced Fresnel Tracer (AFT), an innovative instrumentation for in-process micromeasurement consisting of a smart optical sensors and an automatic follow-up system, based on a temperature controlled grated glass scale or interferometer will be presented. This device may readily be integrated into a turning or grinding machine, e.g. for the needs of quality assurance and to enable an on-line automatic compensation of diameter deviations/1/2. The device contains an optical Fresnel diffraction sensor allowing a fast measurement of the surface topography, achieving three goals: 1) improvement of the instantaneous diameter measurement, 2) surface quality inspection, and 3) determination of the edge gradient or the waviness of the workpiece. The new compact, smart, and precise optical multiparamter sensor, the AFT has been developed and tested.

Paper Details

Date Published: 29 December 1998
PDF: 9 pages
Proc. SPIE 3520, Three-Dimensional Imaging, Optical Metrology, and Inspection IV, (29 December 1998); doi: 10.1117/12.334328
Show Author Affiliations
Burkhard Huhnke, Technische Univ. Braunschweig (Germany)
Gunnar Urbschat, Technische Univ. Braunschweig (Germany)

Published in SPIE Proceedings Vol. 3520:
Three-Dimensional Imaging, Optical Metrology, and Inspection IV
Kevin G. Harding; Donald J. Svetkoff; Katherine Creath; James S. Harris, Editor(s)

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