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Proceedings Paper

Stage Cartesian self-calibration: a second method
Author(s): Michael T. Takac; John M. Whittey
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Paper Abstract

A physical two-dimensional Cartesian reference has been demonstrated using group theory principles pioneered by Michael Raugh. The first stage Cartesian self-calibration introduction to the microlithographic industry was developed by Stanford University, Hewlett Packard, and IBM San Jose using Leica's LMS-2000 and LMS-2020 platforms. Recently Leica developed a different method based on a similar theory to achieve a Cartesian calibration for their LMS-IPRO x-y metrology system. A review of these methods and a comparison of the results obtained between the methods are presented.

Paper Details

Date Published: 18 December 1998
PDF: 7 pages
Proc. SPIE 3546, 18th Annual BACUS Symposium on Photomask Technology and Management, (18 December 1998); doi: 10.1117/12.332853
Show Author Affiliations
Michael T. Takac, IBM Corp. (United States)
John M. Whittey, Leica Inc. (United States)

Published in SPIE Proceedings Vol. 3546:
18th Annual BACUS Symposium on Photomask Technology and Management
Brian J. Grenon; Frank E. Abboud, Editor(s)

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