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Proceedings Paper

Si micromachining and whispering-gallery dielectric resonator modes: an original issue for high-Q coplanar millimeter-wave cavity
Author(s): Bertrand Guillon; D. Cros; T. Parra; Patrick Pons; J. C. Lalaurie; Robert Plana; Jacques Graffeuil
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Paper Abstract

This paper deals with an original approach for the design and realization of high performance micromachined millimeter wave passive circuits on silicon. Full wave finite element 3D and 2D simulations techniques has been done to design the structures. First, because of the silicon anisotropic properties, we have designed a low loss tapered transition between the 50 (Omega) silicon input/output lines and the micromachined circuit. In order to minimize ohmic losses, new technological processes have been implemented. A 6 mm length micromachined coplanar transmission line, embedded between two tapers and probe pads, and featuring an overall insertion loss of less than 0.8 dB at up to 67 GHz has been achieved. From this technology, we have realized a high quality factor cavity in the 35 GHz range through an appropriate coupling between a micromachined coplanar line and a dielectric resonator acting on it whispering gallery modes. This original structure features a loaded Q of about 2000.

Paper Details

Date Published: 13 November 1998
PDF: 11 pages
Proc. SPIE 3465, Millimeter and Submillimeter Waves IV, (13 November 1998); doi: 10.1117/12.331173
Show Author Affiliations
Bertrand Guillon, Lab. d'Analyse et d'Architecture des Systemes (France)
D. Cros, Institut de Recherche en Communications Optiques et Microondes (France)
T. Parra, Lab. d'Analyse et d'Architecture des Systemes (France)
Patrick Pons, Lab. d'Analyse et d'Architecture des Systemes (France)
J. C. Lalaurie, Ctr. National d'Etudes Spatiales (France)
Robert Plana, Lab. d'Analyse et d'Architecture des Systemes (France)
Jacques Graffeuil, Lab. d'Analyse et d'Architecture des Systemes (France)

Published in SPIE Proceedings Vol. 3465:
Millimeter and Submillimeter Waves IV
Mohammed N. Afsar, Editor(s)

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