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Proceedings Paper

Effects of feature orientation in tomographic reconstructions
Author(s): Andrew R. Kalukin; Zachary H. Levine; Sean P. Frigo; Ian McNulty; Markus Kuhn
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Paper Abstract

We performed an x-ray nanotomography experiment at the Advanced Photon Source for the purpose of making a 3D image of a sample contain an integrated circuit interconnect. Nine projections of the sample were made over an angular range of 140 degrees using 1573 eV photons and scanning transmission x-ray microscope having a focal spot size of about 150 nm. Reconstructions of experimental and simulated data, using a simultaneous iterative reconstruction technique, show that a sample that is highly opaque along certain lines of sight must be strategically oriented with respect to the rotation axis to minimize the attenuation of photons through the sample and maximize the contrast in each image.

Paper Details

Date Published: 6 November 1998
PDF: 9 pages
Proc. SPIE 3449, X-Ray Microfocusing: Applications and Techniques, (6 November 1998); doi: 10.1117/12.330353
Show Author Affiliations
Andrew R. Kalukin, Rensselaer Polytechnic Institute and National Institute of Standards and Technology (United States)
Zachary H. Levine, National Institute of Standards and Technology (United States)
Sean P. Frigo, Argonne National Lab. (United States)
Ian McNulty, Argonne National Lab. (United States)
Markus Kuhn, Digital Equipment Corp. (United States)

Published in SPIE Proceedings Vol. 3449:
X-Ray Microfocusing: Applications and Techniques
Ian McNulty, Editor(s)

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