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Proceedings Paper

Fabrication of an aspherical mirror for soft x-ray optics system
Author(s): Petros Abraha Abbay; Toyoshiro Inamura; Tamio T. Hara; Toshio Sata
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Paper Abstract

The development of soft x-ray optics demands an extremely smooth aspherical mirrors with a geometrical accuracy in the sub nanometer range. So far several fabrication methods that utilize high precision machining operations, ion beam milling and plasma assisted chemical etching have been under study with each method having its own advantages and disadvantages. This study introduces a new fabrication method that makes use of an oil pressure to elastically deflect a finished spherical surface. The validity of the proposed method is assessed an the effective parameters are defined.

Paper Details

Date Published: 29 October 1998
PDF: 6 pages
Proc. SPIE 3429, Current Developments in Optical Design and Engineering VII, (29 October 1998); doi: 10.1117/12.328525
Show Author Affiliations
Petros Abraha Abbay, Meijo Univ. (Japan)
Toyoshiro Inamura, Toyota Technological Institute (Japan)
Tamio T. Hara, Nagoya Institute of Technology (Japan)
Toshio Sata, Nagoya Institute or Technology (Japan)

Published in SPIE Proceedings Vol. 3429:
Current Developments in Optical Design and Engineering VII
Alson E. Hatheway; Robert E. Fischer; Malachy McConnell; Lawrence M. Germann; Lawrence M. Germann; Alson E. Hatheway; Malachy McConnell; Warren J. Smith, Editor(s)

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