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Proceedings Paper

Scatterometer at Korea Research Institute of Standards and Science (KRISS) for bidirectional reflectance distribution function (BRDF)
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Paper Abstract

A description is given of the scatterometer which has been developed at KRISS for BRDF and diffraction pattern measurement. Light source, goniometer, and receiver is described. As a light source, the collimated HeNe and argon ion laser is used, with which the wavelengths of 632.8, 514.5, and 488.0 nm are available. The goniometer has 6 degrees of freedom. The precision of scattering polar angle is enhanced by choosing long rotation arm (length: 1.2 meter) placed on the stepmotor-controlled rotary table whose angle is read by the angle encoder with the resolution of 0.0001 degree and accuracy 0.001 degree. The receiver has a wide dynamic range greater than 1014 in intensity without intensity attenuation and receiver aperture change, which is made by cascading three kinds of detectors: photodiode (PD), photo- multiplier in direct current mode (DC), and photo-multiplier in pulse counting mode (PC). The measured instrument signature and the sinusoidal grating BRDF at the wavelength of 488 nm is presented.

Paper Details

Date Published: 30 October 1998
PDF: 9 pages
Proc. SPIE 3426, Scattering and Surface Roughness II, (30 October 1998); doi: 10.1117/12.328472
Show Author Affiliations
Byong Chon Park, Korea Research Institute of Standards and Science (South Korea)
Yun Woo Lee, Korea Research Institute of Standards and Science (South Korea)
Beomhoan O, Inha Univ. (South Korea)


Published in SPIE Proceedings Vol. 3426:
Scattering and Surface Roughness II
Zu-Han Gu; Alexei A. Maradudin, Editor(s)

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