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Proceedings Paper

Characterization of planarity of polymer thin films on rough surfaces
Author(s): Wen-li Wu; William E. Wallace
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Paper Abstract

Angular dependent total reflection x-ray fluorescence (TRXF) is used to characterize the surface roughness or the extent of planarization of a thin polymer coating on a stainless steel surface with significant roughness. The objective of this work is to explore the use of TRXF as a non-contact and quantitative technique for characterizing surface roughness of thin film coatings. Once developed, this technique is expected to perform equally well on other surface coating materials other than polymers. Unlike optical methods, whether the thin films are transparent or not is not expected to affect the outcome of this measurement. TRXF data were collected with incident angle in the region around the polymer critical angle and were analyzed in conjunction with the results deduced from specular x-ray reflectivity (XR). Comparison between the TRXF results and those obtained from atomic force microscope (AFM) was also made in order to evaluate this TRXF method critically.

Paper Details

Date Published: 30 October 1998
PDF: 7 pages
Proc. SPIE 3426, Scattering and Surface Roughness II, (30 October 1998); doi: 10.1117/12.328458
Show Author Affiliations
Wen-li Wu, National Institute of Standards and Technology (United States)
William E. Wallace, National Institute of Standards and Technology (United States)

Published in SPIE Proceedings Vol. 3426:
Scattering and Surface Roughness II
Zu-Han Gu; Alexei A. Maradudin, Editor(s)

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