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Proceedings Paper

Novel approaches in polarized optical reflectometry
Author(s): Gregory I. Surdutovich; R. Z. Vitlina; Alexandre V. Ghiner; Vitor Baranauskas
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Paper Abstract

Due to its simplicity polarization reflectometry technique have some advantages over the ellipsometric methods. We demonstrate this claim in the threefold manner suggesting three novel polarization reflectometry methods for the determination of an optical anisotropy. The first method is based on the measurement of s- and p- polarized light reflectances under near normal or grazing angles (or both) and of the Brewster angle. It may be applied to any uniaxially anisotropic medium. The second method is based on the use of the Azzam Universal Relationship (AUR) between the Fresnel s- and p- reflection coefficients. For a flat surface and an isotropic medium, the Azzam combination of coefficients becomes zero and thus independent of the incidence angle. Finally, for those cases in which the anisotropy of the material of a film deposited on an isotropic substrate is itself of interest a third Interference Method (IM) is suggested. This technique makes use of the different dependences of s- and p- polarized beam optical pathlength changes on the variation of the angle of incidence.

Paper Details

Date Published: 21 October 1998
PDF: 11 pages
Proc. SPIE 3485, 11th International Vavilov Conference on Nonlinear Optics, (21 October 1998); doi: 10.1117/12.328251
Show Author Affiliations
Gregory I. Surdutovich, Univ. Estadual de Campinas (Brazil)
R. Z. Vitlina, Univ. Estadual de Campinas (Brazil)
Alexandre V. Ghiner, Univ. Federal do Maranhao (Brazil)
Vitor Baranauskas, Univ. Estadual de Campinas (Brazil)

Published in SPIE Proceedings Vol. 3485:
11th International Vavilov Conference on Nonlinear Optics
Sergei G. Rautian, Editor(s)

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