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Proceedings Paper

Optocontact mini-displacement measurement instrument
Author(s): Bo Liu; Ling Yang; Jian Zhang; Jian-Ying Fan
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Paper Abstract

The opto-contact mini-displacement measuring instrument is mainly for mini-displacement measurement. It not only can measure small geometry size, for example silicon chip thickness, but also can measure some other parameters such as small translation, waviness, diameter run-out, vibration. Combining optical, mechanical, electronic and computer technologies, this instrument can do some work automatically like dynamic sampling, real-time processing, on-line measuring. The instrument is based on laser triangulation, it is composed of a CCD, an optical system and a computer, which can sample and process data with high speed. The measuring principle is described as follows: reflected or scattered light by measured surface are received by CCD, since a good relationship between the offset of image point on CCD and the mini-displacement of object located on a reference plane, a mathematical model can be founded, then the mini-displacement may be calculated according to the offset of image point position on CCD. It's measuring range is +/- 500 micrometers , and precision resolution is +/- 0.1 micrometers .

Paper Details

Date Published: 8 October 1998
PDF: 3 pages
Proc. SPIE 3415, Laser Diodes and Applications III, (8 October 1998); doi: 10.1117/12.326629
Show Author Affiliations
Bo Liu, Harbin Univ. of Science and Technology (China)
Ling Yang, Harbin Univ. of Science and Technology (China)
Jian Zhang, Harbin Univ. of Science and Technology (China)
Jian-Ying Fan, Harbin Univ. of Science and Technology (China)

Published in SPIE Proceedings Vol. 3415:
Laser Diodes and Applications III
Pierre Galarneau, Editor(s)

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