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Proceedings Paper

High-precision multiple-degree-of-freedom piezoelectric actuator
Author(s): Timothy N. Chang; Xuemei Sun; Vincenzo Pappano; Zhiming Ji; Reggie Caudill
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Paper Abstract

This paper describes the construction and control of a two Degree-Of-Freedom (DOF) piezoelectric actuator. This actuator is part of a 6 DOF manipulator capable of linear resolution to 2 nanometer and angular resolution to 1 arc- second. Design of this actuator differs from the existing ones in that it has a monolithic structure which enables a high bandwidth, high force realization. The actuator is controlled by the TMS320C31 Digital Signal Processor residing on a standard Pentium PC. A number of nonlinearities exist in the actuator, stemming from the geometry and materials properties. For example, coupling of the actuator elements can be modeled as a soft spring which increases scale factor at high actuation levels. In this work, a combination of feedforward (input shaping) and feedback control are applied to reduce the effects of (1) scale factor nonlinearities, (2) hysteresis, and (3) output oscillations. Application of this actuator include: optoelectronics assembly, optical fiber alignment, and semiconductor processing.

Paper Details

Date Published: 5 October 1998
PDF: 8 pages
Proc. SPIE 3519, Microrobotics and Micromanipulation, (5 October 1998); doi: 10.1117/12.325731
Show Author Affiliations
Timothy N. Chang, New Jersey Institute of Technology (United States)
Xuemei Sun, New Jersey Institute of Technology (United States)
Vincenzo Pappano, New Jersey Institute of Technology (United States)
Zhiming Ji, New Jersey Institute of Technology (United States)
Reggie Caudill, New Jersey Institute of Technology (United States)

Published in SPIE Proceedings Vol. 3519:
Microrobotics and Micromanipulation
Armin Sulzmann; Bradley J. Nelson, Editor(s)

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