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Proceedings Paper

Value added with in-line electrical characterization: fact or fiction?
Author(s): Steven R. Weinzierl; Tim E. Turner
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Paper Abstract

Although it is generally accepted that in-line and off-line electrical characterization measurements have value in a semiconductor fab, their actual value to a specific fab depends heavily on a wide variety of parameters such as: the fab's end product and throughput; the sensitivity of the measurements to various process deviations and the implementation cost; etc. This paper will detail some of these dependencies and develop an economic method for the justification of various in-line electrical tests.

Paper Details

Date Published: 27 August 1998
PDF: 8 pages
Proc. SPIE 3509, In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II, (27 August 1998); doi: 10.1117/12.324396
Show Author Affiliations
Steven R. Weinzierl, Keithley Instruments, Inc. (United States)
Tim E. Turner, Keithley Instruments, Inc. (United States)


Published in SPIE Proceedings Vol. 3509:
In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II
Sergio A. Ajuria; Tim Z. Hossain, Editor(s)

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