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Proceedings Paper

Characterization techniques for surface-micromachined devices
Author(s): William P. Eaton; Norman F. Smith; Lloyd W. Irwin; Danelle M. Tanner
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Paper Abstract

Using a microengine as the primary test vehicle, we have examined several aspects of characterization. Parametric measurements provide fabrication process information. Drive signal optimization is necessary for increased microengine performance. Finally, electrical characterization of resonant frequency and quality factor can be more accurate than visual techniques.

Paper Details

Date Published: 8 September 1998
PDF: 8 pages
Proc. SPIE 3514, Micromachined Devices and Components IV, (8 September 1998); doi: 10.1117/12.323919
Show Author Affiliations
William P. Eaton, Sandia National Labs. (United States)
Norman F. Smith, Sandia National Labs. (United States)
Lloyd W. Irwin, Sandia National Labs. (United States)
Danelle M. Tanner, Sandia National Labs. (United States)

Published in SPIE Proceedings Vol. 3514:
Micromachined Devices and Components IV
Patrick J. French; Kevin H. Chau, Editor(s)

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