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Proceedings Paper

Microresonant devices for power conversion
Author(s): J. Mark Noworolski; Seth R. Sanders
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Paper Abstract

We present the concept of utilizing micro-electromechanical (MEM) energy storage for power conversion. A capacitor and inductor-free step-up converter based on mechanical resonance and silicon strain energy is introduced. In this circuit, a single MEM device is used to generate and supply high voltages, suitable for driving other MEM devices. A test converter using vertical polysilicon based resonators as energy storage elements is fabricated and tested, demonstrating the basic step-up function.

Paper Details

Date Published: 8 September 1998
PDF: 6 pages
Proc. SPIE 3514, Micromachined Devices and Components IV, (8 September 1998); doi: 10.1117/12.323897
Show Author Affiliations
J. Mark Noworolski, Univ. of California/Berkeley (United States)
Seth R. Sanders, Univ. of California/Berkeley (United States)

Published in SPIE Proceedings Vol. 3514:
Micromachined Devices and Components IV
Patrick J. French; Kevin H. Chau, Editor(s)

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