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Proceedings Paper

Double-ended Fizeau interferometers with phase-stepping evaluation for measurement of cubes
Author(s): R. Arnold Nicolaus; Chu-Shik Kang; Gerhard Boensch
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Paper Abstract

Double-ended Fizzeau type interferometers can be applied advantageously for direct dimensional measurements of regular bodies with parallel, flat measuring surfaces. At PTB, such an interferometer with specific equipment for phase stepping interferometry has been developed. The basic interferometer or etalon consists of two parallel, semi- reflecting reference plates. The symmetrical arrangement of two optical systems for illumination and observation of the interference pattern allows alternating measurements from both sides. The interference systems are observed in reflection and focused onto CCD-cameras. The optical pates are attached to a rigid frame, so that both an adjustment of the interference and a parallel displacement for the phase stepping technique is obtained. Servo-control units allow a precise value of 1/4 interference order for the displacement to be adjusted, which is necessary for a special Fizzeau algorithm. The dimensions of the interferometer are designed for volume measurements of cubes of about 80 mm, which are used as density standards. The distance topography between two opposed surfaces of the cubes are derived from measurements of the empty etalon and measurements with the cube inserted. The interferometer can also measure gauge blocks which are not wrung to a base plate by direct optical probing of the free surfaces and explore the influence of roughness and optical phase shift.

Paper Details

Date Published: 30 September 1998
PDF: 7 pages
Proc. SPIE 3477, Recent Developments in Optical Gauge Block Metrology, (30 September 1998); doi: 10.1117/12.323098
Show Author Affiliations
R. Arnold Nicolaus, Physikalisch-Technische Bundesanstalt (Germany)
Chu-Shik Kang, Korea Research Institute of Standards and Science (South Korea)
Gerhard Boensch, Physikalisch-Technische Bundesanstalt (Germany)

Published in SPIE Proceedings Vol. 3477:
Recent Developments in Optical Gauge Block Metrology
Jennifer E. Decker; Nicholas Brown, Editor(s)

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