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Proceedings Paper

Development of a new automatic gauge block interferometer up to 250 mm
Author(s): Tatsuya Narumi; Shunji Shutoh; Taizo Nakamura; Junichi Iida; Masaji Sawabe
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Paper Abstract

An interferometer has been developed by Mitutoyo Corporation which automatically measures with the optical sensor the fraction of interference fringe. The optical fiber sensor is fixed around the center position of gauge block and central both sides of platen, and the fraction is measured the interference fringe by scanning of optical wedge, which is put between half-reflection-mirror and gauge block. The light source uses both 633 nm and 543 nm He-Ne lasers stabilized within 1 X 10-9. The gauge block length can be determined by means of coincidence method. A set of 12 gauge blocks placed on the table and can be measured one by one in turn. For the refractive index of surrounding air, temperature, atmospheric pressure and humidity are measured by sensor in the interferometer. A personal bias by interference fringe reading is eliminated and measurement is carried out with easy operation and high precision. Repeatability of reading of interference fringe fraction.

Paper Details

Date Published: 30 September 1998
PDF: 6 pages
Proc. SPIE 3477, Recent Developments in Optical Gauge Block Metrology, (30 September 1998); doi: 10.1117/12.323094
Show Author Affiliations
Tatsuya Narumi, Mitutoyo Corp. (Japan)
Shunji Shutoh, Mitutoyo Corp. (Japan)
Taizo Nakamura, Mitutoyo Corp. (Japan)
Junichi Iida, Mitutoyo Corp. (Japan)
Masaji Sawabe, Mitutoyo Corp. (Japan)

Published in SPIE Proceedings Vol. 3477:
Recent Developments in Optical Gauge Block Metrology
Jennifer E. Decker; Nicholas Brown, Editor(s)

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