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Proceedings Paper • Open Access

Microgasketing and adhesive wicking techniques for fabrication of microfluidic devices
Author(s): Chang-Jin Kim

Paper Abstract

Microgasketing procedure, developed for MEMS fluidic device fabrication, is described. Planar-processed microdevices of a volume even less than 1 nl can be selectively filled with liquid and sealed at room temperature in a batch fashion. Isolating a liquid within such a small device area by the gasketing and minimizing air traps during sealing by controlled wicking are the key issues addressed. Two unique microdevices made possible by the described technique are presented: (1) a microrelay switched by a liquid-metal droplet (10 micrometers in diameter), and (2) a highly efficient (e.g., power consumption < 10 (mu) W with driving potential < 10 V) liquid micromotor driven by surface tension force.

Paper Details

Date Published: 10 September 1998
PDF: 6 pages
Proc. SPIE 3515, Microfluidic Devices and Systems, (10 September 1998); doi: 10.1117/12.322072
Show Author Affiliations
Chang-Jin Kim, Univ. of California/Los Angeles (United States)

Published in SPIE Proceedings Vol. 3515:
Microfluidic Devices and Systems
A. Bruno Frazier; Chong Hyuk Ahn, Editor(s)

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