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Proceedings Paper

Optical design and implementation of a multi-functional miniature interferometer
Author(s): Chih-Kung Lee; Giin-Yuan Wu; Wen-Jong Wu; Chin-Fa Lee; Chan-Ching Lin; Yen-Jen Lin
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Paper Abstract

The design of a newly developed interferometer is described. This interferometer possesses built-in measuring modes such as: (1) absolute vibration, (2) differential vibration, and (3) distance measuring. The circular polarization interferometer configuration, which gives it its compact size and which has a built-in microscopic imaging system, is detailed. In addition, the mechanical layout of the system which guarantees that all alignment functions are orthogonal to each other is also discussed. Various experimental tests were performed to demonstrate the nanometer resolution and megahertz bandwidth capabilities of this new developed interferometer.

Paper Details

Date Published: 21 September 1998
PDF: 9 pages
Proc. SPIE 3482, International Optical Design Conference 1998, (21 September 1998); doi: 10.1117/12.322053
Show Author Affiliations
Chih-Kung Lee, National Taiwan Univ. (Taiwan)
Giin-Yuan Wu, AHEAD Optoelectronics, Inc. (Taiwan)
Wen-Jong Wu, National Taiwan Univ. (Taiwan)
Chin-Fa Lee, National Taiwan Univ. (Taiwan)
Chan-Ching Lin, AHEAD Optoelectronics, Inc. (Taiwan)
Yen-Jen Lin, National Taiwan Univ. (Taiwan)


Published in SPIE Proceedings Vol. 3482:
International Optical Design Conference 1998
Leo R. Gardner; Kevin P. Thompson, Editor(s)

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