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Proceedings Paper

Photoinscribed waveguides, devices, and gratings in polyglass on silicon
Author(s): Tahar Touam; Rahmani Sara; Mark P. Andrews; S. Iraj Najafi
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Paper Abstract

We report on design, fabrication and characterization of channel waveguides, star couplers, gratings and dense wavelength division multiplexers imprinted by an ultraviolet lamp and an excimer laser in polyglass on silicon prepared by a low temperature sol-gel process.

Paper Details

Date Published: 21 September 1998
PDF: 5 pages
Proc. SPIE 3482, International Optical Design Conference 1998, (21 September 1998); doi: 10.1117/12.321985
Show Author Affiliations
Tahar Touam, Ecole Polytechnique de Montreal (Canada)
Rahmani Sara, Ecole Polytechnique de Montreal (Canada)
Mark P. Andrews, McGill Univ. (Canada)
S. Iraj Najafi, Ecole Polytechnique de Montreal (Canada)

Published in SPIE Proceedings Vol. 3482:
International Optical Design Conference 1998
Leo R. Gardner; Kevin P. Thompson, Editor(s)

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