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Proceedings Paper

Pulsed laser deposition: prospects for commercial deposition of epitaxial thin films
Author(s): Ross E. Muenchausen
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Paper Abstract

In this paper we briefly define pulsed laser deposition, current applications, research directed at gaining a better understanding of the pulsed laser deposition process, and suggest some future directions to enable commercial applications.

Paper Details

Date Published: 14 September 1998
PDF: 8 pages
Proc. SPIE 3343, High-Power Laser Ablation, (14 September 1998); doi: 10.1117/12.321616
Show Author Affiliations
Ross E. Muenchausen, Los Alamos National Lab. (United States)

Published in SPIE Proceedings Vol. 3343:
High-Power Laser Ablation
Claude R. Phipps, Editor(s)

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