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Proceedings Paper

Optical correlation technique for measurement of roughness at microfacets of reflection-type diffraction gratings
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Paper Abstract

Physical principles and techniques the noncontact interference method for rough microfacets surface diagnostics are discussed. Measuring of roughness at different facets we obtained the values of Rq within the range from 0.005 to 0.05 micrometers.

Paper Details

Date Published: 19 August 1998
PDF: 3 pages
Proc. SPIE 3573, OPTIKA '98: 5th Congress on Modern Optics, (19 August 1998); doi: 10.1117/12.321020
Show Author Affiliations
Oleg V. Angelsky, Chernivtsy Univ. (Ukraine)
Peter P. Maksimyak, Chernivtsy Univ. (Ukraine)


Published in SPIE Proceedings Vol. 3573:
OPTIKA '98: 5th Congress on Modern Optics
Gyorgy Akos; Gabor Lupkovics; Andras Podmaniczky, Editor(s)

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