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Proceedings Paper

Changes in optical properties of excimer-laser-irradiated polymers
Author(s): Bela Hopp; Zsuzsanna Marton; Maria Csete; Ferenc Ignacz; Zsolt Bor
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Paper Abstract

Nanosecond resolution measurements were performed to investigate the change of reflectivity of polymers (PolyMethylMethacrylate and PolyImide) under ArF excimer laser irradiation. The temperature increase due to the irradiation was also calculated. From the results of the experiments and calculations we concluded that several processes influence the observed changes in optical properties of the irradiated polymer samples, such as the quickly expanding gas that leaves the surface immediately after the incidence of the excimer pulse, thermal decomposition of the surface layer and the decrease of the refractive index caused by the heat.

Paper Details

Date Published: 19 August 1998
PDF: 4 pages
Proc. SPIE 3573, OPTIKA '98: 5th Congress on Modern Optics, (19 August 1998); doi: 10.1117/12.320985
Show Author Affiliations
Bela Hopp, Research Group on Laser Physics (Hungary)
Zsuzsanna Marton, JATE Univ. (Hungary)
Maria Csete, JATE Univ. (Hungary)
Ferenc Ignacz, Research Group on Laser Physics (Hungary)
Zsolt Bor, JATE Univ. (Hungary)

Published in SPIE Proceedings Vol. 3573:
OPTIKA '98: 5th Congress on Modern Optics
Gyorgy Akos; Gabor Lupkovics; Andras Podmaniczky, Editor(s)

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