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Proceedings Paper

MEMS design rule checking: a batch approach for remote operation
Author(s): Victor R. Yarberry
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Paper Abstract

This paper describes a design rule checking (DRC) tool developed as an aid for designing microelectromechanical structures (MEMS) using AutoCADTM running on a Windows NT workstation. The application suite, MEMSdrc, consists of a graphical user interface integrated into AutoCADTM to invoke DRC, translation and interface software to communicate with a commercial IC layout design checking software package, and routines to interactively display and review the results. The user interface provides the capability to select a checking window area and specific DRC rules to be applied to the design. The MEMS structures, defined as 2D AutoCADTM geometry are translated first into DXF format, then to GDSII format. A remote process transfers the files to a Unix workstation where Mentor Graphics ICverify is invoked to perform the layout design rule checks. Upon completion, the results are translated into DXF geometry and returned back to the Windows NT workstation to be overlaid onto the original design. A set of icons are provided for the user to interactively review the results inside of AutoCADTM using a first/next/previous technique.

Paper Details

Date Published: 20 July 1998
PDF: 8 pages
Proc. SPIE 3328, Smart Structures and Materials 1998: Smart Electronics and MEMS, (20 July 1998); doi: 10.1117/12.320190
Show Author Affiliations
Victor R. Yarberry, Sandia National Labs. (United States)

Published in SPIE Proceedings Vol. 3328:
Smart Structures and Materials 1998: Smart Electronics and MEMS
Vijay K. Varadan; Paul J. McWhorter; Richard A. Singer; Michael J. Vellekoop, Editor(s)

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