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Proceedings Paper

Integral design of a microacoustic wave-based sensor device
Author(s): G. W. Lubking; Bernhard Jakoby; Michael J. Vellekoop
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Paper Abstract

Every oscillator contains an element which determines the frequency of the oscillator. A delay-line can be such an element. An oscillator which uses a delay-line puts specific demands on the electrical circuits needed in this oscillator. In this paper we look systematically at the parameters involved in the design of the electronic circuitry. In order to be able to do this properly we first determine the electrical behavior of an acoustical delay- line with the help of an equivalent circuit. Consequently we look at the parameters of the electronic circuit which are important for realization of a highly stable oscillator with special attention for the fact that the frequency determining element is a delay-line. With the help of this analysis we were able to find design criteria. According to this criteria we built actual circuits by using monolithic integration and measured them. The result of these measurements are given.

Paper Details

Date Published: 20 July 1998
PDF: 9 pages
Proc. SPIE 3328, Smart Structures and Materials 1998: Smart Electronics and MEMS, (20 July 1998); doi: 10.1117/12.320177
Show Author Affiliations
G. W. Lubking, Delft Univ. of Technology (Netherlands)
Bernhard Jakoby, Delft Univ. of Technology (Netherlands)
Michael J. Vellekoop, Delft Univ. of Technology (Netherlands)

Published in SPIE Proceedings Vol. 3328:
Smart Structures and Materials 1998: Smart Electronics and MEMS
Vijay K. Varadan; Paul J. McWhorter; Richard A. Singer; Michael J. Vellekoop, Editor(s)

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