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Proceedings Paper

Submicron position and measurement system for optical edges
Author(s): JiaHu Yuan
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Paper Abstract

Optical edges refer to the cut-lines of difference of optical transmissivity. They exist widely on optical coder. Generally the accuracy of edge's positions shows its quality. This paper describes an opto-electric measuring scheme, which integrates the edge's signal by means of linear CCD camera and identifies automatically its position through computer analysis. In the meantime a precise grating is used as measuring unit and a 2D scanning stage which is derived by stepping motors is designed for searching the edges. A microcomputer performs the functions of the system management, data sample and analysis. The measuring error is less than 0.3 micrometers .

Paper Details

Date Published: 10 August 1998
PDF: 5 pages
Proc. SPIE 3558, Automated Optical Inspection for Industry: Theory, Technology, and Applications II, (10 August 1998); doi: 10.1117/12.318401
Show Author Affiliations
JiaHu Yuan, Chengdu Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 3558:
Automated Optical Inspection for Industry: Theory, Technology, and Applications II
Shenghua Ye, Editor(s)

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