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Proceedings Paper

Micromachined pressure sensor integrated with an imbalanced Mach-Zehnder waveguide on silicon for coherence modulation scheme
Author(s): Henri Porte; Veronique Gorel; Jean-Pierre Goedgebuer
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Paper Abstract

We investigate theoretically and experimentally the principle of a micromachined pressure sensor integrated in silicon. The optical part of the sensor consists of an imbalanced Mach-Zehnder waveguide interferometer. The waveguide is formed by a silicon nitride layer of high refractive index set between two cladding layers of silicon dioxide of lower refractive index. The sensing part of the device consists in a set of membranes obtained by anisotropic etching of the back face of the substrate under the reference arm. The pressure variations applied to the membrane induce a geometrical deformation of the waveguide arm and modify the optical path difference between the arms. The non-linear variation of the phase versus the applied pressure is obtained from the spectral analysis of the channeled spectrum transmitted by the interferometer. The static optical path-delay introduced between the arms allows the sensor to be introduce din a coherence modulation scheme, which can result in a remote sensor system, involving an active demodulation.

Paper Details

Date Published: 13 August 1998
PDF: 8 pages
Proc. SPIE 3555, Optical and Fiber Optic Sensor Systems, (13 August 1998); doi: 10.1117/12.318200
Show Author Affiliations
Henri Porte, Univ. de Franche-Comte (France)
Veronique Gorel, Univ. de Franche-Comte (France)
Jean-Pierre Goedgebuer, Univ. de Franche-Comte (France)

Published in SPIE Proceedings Vol. 3555:
Optical and Fiber Optic Sensor Systems
Shanglian Huang; Kim D. Bennett; David A. Jackson, Editor(s)

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