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Proceedings Paper

Nondestructive measurement for impurity concentration inserted in multilayer inhomogeneous material
Author(s): Jianxin Zhu
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Paper Abstract

In this paper, for the solid sample composed of three layers in which the thermal property is inhomogeneous and tho optical-absorption coefficient is varied, a new and effective numerical method is proposed, and it is used to nondestructively reconstruct the depth distribution of optical-absorption coefficient in multilayer inhomogeneous material through by the photothermal signal which are measured on the surface of a sample with the photothermal method. By means of the relation between absorption coefficient and nitrogen concentration, we may obtain the spatial distribution of the nitrogen concentration in a GaP:N sample. Inverse results by experimental data show that the performance of the approach at p/n junction is better.

Paper Details

Date Published: 12 August 1998
PDF: 8 pages
Proc. SPIE 3551, Integrated Optoelectronics II, (12 August 1998); doi: 10.1117/12.317980
Show Author Affiliations
Jianxin Zhu, Zhejiang Univ. (China)

Published in SPIE Proceedings Vol. 3551:
Integrated Optoelectronics II
BingKun Zhou; Ray T. Chen, Editor(s)

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