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Proceedings Paper

Theoretical model and experimental study for dry and steam laser cleaning
Author(s): Yongfeng Lu; Wen Dong Song; Y. Zhang; Tohsiew Low
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Paper Abstract

Dry and steam laser cleaning was investigated both theoretically and experimentally. The experimental results show that cleaning efficiency increases with increasing laser fluence or decreasing laser wavelength. The cleaning thresholds exist both dry and steam laser cleaning. A cleaning model was established for laser-induced removal of particles from solid surfaces by taking adhesion force, such as Van der Waals force and capillary force, and cleaning force into account. Laser cleaning forces are induced by fast thermal expansion of particles and/or solid surfaces irradiated by laser for dry laser cleaning and evaporating liquid film heated by laser irradiation for steam laser cleaning, respectively. It was found that laser cleaning forces increase with an increase of laser fluence. At the same laser fluence, cleaning forces increase with decreasing laser wavelength. Cleaning thresholds can be obtained by comparing cleaning force and adhesion force. The experimental results are good consistent with the theoretical analysis.

Paper Details

Date Published: 15 August 1998
PDF: 12 pages
Proc. SPIE 3550, Laser Processing of Materials and Industrial Applications II, (15 August 1998); doi: 10.1117/12.317931
Show Author Affiliations
Yongfeng Lu, National Univ. of Singapore (United States)
Wen Dong Song, National Univ. of Singapore (Singapore)
Y. Zhang, National Univ. of Singapore (Singapore)
Tohsiew Low, National Univ. of Singapore (Singapore)

Published in SPIE Proceedings Vol. 3550:
Laser Processing of Materials and Industrial Applications II
ShuShen Deng; S. C. Wang, Editor(s)

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