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Proceedings Paper

Synthesis of carbon nitride films by arc-heated atomic nitrogen beams assisted pulsed laser ablation
Author(s): Ning Xu; Yuancheng Du; Zhifeng Ying; Zhongmin Ren; Fuming Li
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Paper Abstract

Carbon nitride films were synthesized by active atomic nitrogen beams intersecting pulsed laser plumes at the substrates without heating. The properties of the films were studied by Auger electron spectroscopy (AES), X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD) and Raman spectroscopy. AES and XPS analysis show that the as- deposited carbon nitride films are mainly composed of [N] and [C], and the composition ratios ([N]/[C]) increase as the pulsed laser repetition rate and energy. XRD results show that several diffraction peaks attributed to (beta) -C3N4 phase were identified. Raman spectra show that several prominent bands related to C-N bondings could be observed.

Paper Details

Date Published: 15 August 1998
PDF: 10 pages
Proc. SPIE 3550, Laser Processing of Materials and Industrial Applications II, (15 August 1998); doi: 10.1117/12.317911
Show Author Affiliations
Ning Xu, Fudan Univ. (China)
Yuancheng Du, Fudan Univ. (China)
Zhifeng Ying, Fudan Univ. (China)
Zhongmin Ren, Fudan Univ. (China)
Fuming Li, Fudan Univ. (China)

Published in SPIE Proceedings Vol. 3550:
Laser Processing of Materials and Industrial Applications II
ShuShen Deng; S. C. Wang, Editor(s)

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