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Proceedings Paper

Laser synthesis of nano powders of Si-based nitrides and carbides
Author(s): Yong Liang; Zhengang Wu; Fen Zheng; Quanggang Xian; Zhongchao Feng
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Paper Abstract

Amorphous Si3N4, Si/N/C and crystalline SiC nano- powders, 5 - 50 nm in mean diameter, with yields of 250 g/h were synthesized via laser induced gas phase reactions flow cost hexamethyldisilazane (HMDS) and NH3 (or H2). Reaction flame temperatures, which were controlled by the total gas flow rate, greatly influenced powder composition and crystallinity. Amorphous Si3N4 powders (96 wt%) were obtained at 1000 degrees Celsius flow HMDS + NH3; (beta) -SiC (93 wt%) was formed at 1600 degrees Celsius with H2. Amorphous Si/N/C powders with various N/C ratios (0.1 - 6) were synthesized at various temperatures. The main impurities in the powders were the organo-ligands such as NHx and CHx (X equals 1 - 3) whose existence also resulted in a strong surface absorption of oxygen. Commercial production technologies of above mentioned powders were also stated.

Paper Details

Date Published: 15 August 1998
PDF: 8 pages
Proc. SPIE 3550, Laser Processing of Materials and Industrial Applications II, (15 August 1998); doi: 10.1117/12.317900
Show Author Affiliations
Yong Liang, Institute of Metal Research (China)
Zhengang Wu, Institute of Metal Research (China)
Fen Zheng, Institute of Metal Research (China)
Quanggang Xian, Institute of Metal Research (China)
Zhongchao Feng, Institute of Metal Research (China)

Published in SPIE Proceedings Vol. 3550:
Laser Processing of Materials and Industrial Applications II
ShuShen Deng; S. C. Wang, Editor(s)

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