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Proceedings Paper

High-performance micromachined thermopile linear arrays
Author(s): Marc C. Foote; Eric W. Jones
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Paper Abstract

Linear thermopile infrared detector arrays have been produced with D* values as high as 2.2 X 109 cmHz1/2W for 83 ms response times. Typical responsivity is 1000 V/W. This result has been achieved with Bi-Te and Bi-Sb-Te thermoelectric materials on micromachined silicon nitride membranes. Results for several device geometries are described and compared to literature values for Schwartz type thermocouple detectors and for thin film thermopile detectors and arrays. Measurements of responsivity as a function of modulation frequency and wavelength are presented.

Paper Details

Date Published: 22 July 1998
PDF: 6 pages
Proc. SPIE 3379, Infrared Detectors and Focal Plane Arrays V, (22 July 1998); doi: 10.1117/12.317587
Show Author Affiliations
Marc C. Foote, Jet Propulsion Lab. (United States)
Eric W. Jones, Jet Propulsion Lab. (United States)

Published in SPIE Proceedings Vol. 3379:
Infrared Detectors and Focal Plane Arrays V
Eustace L. Dereniak; Robert E. Sampson, Editor(s)

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