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Proceedings Paper

Stitching: high-spatial-resolution microsurface measurements over large areas
Author(s): Shouhong Tang
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Paper Abstract

To achieve a measurement with high spatial resolution over a large area, we stitch together multiple high spatial resolution maps obtained from an interferometric microscope with or without a motorized stage. These maps have a high height precision and a lateral resolution as high as 0.11 micron/pixel. They can be stitched together with acceptable accuracy as long as each of their adjacent areas has enough overlapping pixels. The stitching technique we have developed is based on a computed probability that gives a quantitative measure for the goodness of the chi-square fitting. It is insensitive to the piston and tilt changes of each map. It is also insensitive to the lateral shift and/or rotation between the overlapping maps. This technique is robust and flexible. It is able to give a satisfactory measurement without relying on the accuracy of the stage movement. The map stitching expands the field of view available to an objective lens, which makes it possible to measure a large area without losing high-slope surface features.

Paper Details

Date Published: 6 July 1998
PDF: 7 pages
Proc. SPIE 3479, Laser Interferometry IX: Applications, (6 July 1998); doi: 10.1117/12.316470
Show Author Affiliations
Shouhong Tang, Phase Shift Technology Inc. (United States)

Published in SPIE Proceedings Vol. 3479:
Laser Interferometry IX: Applications
Ryszard J. Pryputniewicz; Gordon M. Brown; Werner P. O. Jueptner, Editor(s)

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