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Proceedings Paper

Phase correction for coated-pole-tip recession measurement
Author(s): Sen Han
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Paper Abstract

In the Pole Tip Recession (PTR) measurement using a Phase Shifting Interferometer (PSI), the phase shift due to the reflection at the air/thin film/dissimilar substrate interfaces will certainly cause incorrect PTR measurement. In this paper the effects of the variations in the refractive index of the materials and of coating thickness on the PTR measurement have been analyzed, and the PTR offsets and their errors have been calculated.

Paper Details

Date Published: 6 July 1998
PDF: 6 pages
Proc. SPIE 3479, Laser Interferometry IX: Applications, (6 July 1998); doi: 10.1117/12.316440
Show Author Affiliations
Sen Han, Veeco Process Metrology (United States)

Published in SPIE Proceedings Vol. 3479:
Laser Interferometry IX: Applications
Ryszard J. Pryputniewicz; Gordon M. Brown; Werner P. O. Jueptner, Editor(s)

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