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Proceedings Paper

Monitoring and controlling synthesis of bottom antireflective coating materials by in-situ FT-IR technique
Author(s): Shuji Ding; Jianhui Shan; Dinesh N. Khanna
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Paper Abstract

A number of polymeric azo dyes was synthesized in our laboratories in the course of developing and studying i-line bottom antireflective coating materials. The key step in the synthesis involved formation of a diazonium salt intermediate which is a highly energetic species and can quickly convert to a couple of by-products, depending on the reaction medium such as solvent, temperature, time, and acidity. It is important to understand the mechanistic insight and compositional changes during the course of the reaction. ASi ReactIRTM 1000 reaction analysis system was used as the on-line monitor to follow such complicate process. By using this technique, we were able to obtain high quality kinetic data for thermal stability study of the intermediate, gained good understanding of reaction mechanism, optimized the synthesis process effectively, and achieved good control of reaction yield. The in-situ FT-IR technique proved to be a powerful tool for monitoring and controlling such a process. The highly absorptive polymers synthesized by the optimized process showed good consistency of the overall lithographic performance.

Paper Details

Date Published: 29 June 1998
PDF: 11 pages
Proc. SPIE 3333, Advances in Resist Technology and Processing XV, (29 June 1998); doi: 10.1117/12.312481
Show Author Affiliations
Shuji Ding, Clariant Corp. (United States)
Jianhui Shan, Clariant Corp. (United States)
Dinesh N. Khanna, Clariant Corp. (United States)

Published in SPIE Proceedings Vol. 3333:
Advances in Resist Technology and Processing XV
Will Conley, Editor(s)

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