The incorporation of the acetoxy group (AC) increases the thermal flow resistance of acetal derivatized polyhydroxystyrene matrices (ADPHS) without compromising the desirable dissolution characteristics. Two methods of introducing acetoxy to ADPHS resins were developed: (1) An economical one pot synthesis was utilized to make tertiary polymer containing hydroxystyrene (HS), acetoxystyrene (ACS) and acetals of HS. (2) We exploited the unique blending properties of poly(HS/ACS) and poly(HS/acetal HS). Both approaches were evaluated lithographically at 248 nm. It was found that both the tertiary polymer and blending approaches resulted in resists materials with improved T_g while giving resolutions down to 0.20 micrometers for line and space pairs and 0.15 micrometers for isolated lines.

Date Published: 29 June 1998
PDF: 8 pages
Proc. SPIE 3333, Advances in Resist Technology and Processing XV, (29 June 1998); doi: 10.1117/12.312466

Published in SPIE Proceedings Vol. 3333:
Advances in Resist Technology and Processing XV
Will Conley, Editor(s)