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Proceedings Paper

Dissolution of phenolic polymers in aqueous base: the influence of polymer structure
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Paper Abstract

The differences in the dissolution behavior of novolac and poly(4-hydroxystyrene) (PHS) can be explained in terms of differences in the pKa of the two polymers. The proximity of the hydroxyl groups in ortho-ortho bonded novolac causes a large change in the pKa of the polymer as a function of the degree of ionization. The increased distance between phenolic sites in PHS attenuates this effect. Novolac and PHS samples have been titrated from basic to acidic conditions to determine the `apparent pKa' of each polymer as a function of degree of ionization, (alpha) . The turbidimetric endpoints show that novolac precipitates earlier in the titration than PHS. This differences provides an explanation for the `ortho-ortho effect' and the different inhibition efficiencies of these polymers.

Paper Details

Date Published: 29 June 1998
PDF: 9 pages
Proc. SPIE 3333, Advances in Resist Technology and Processing XV, (29 June 1998); doi: 10.1117/12.312345
Show Author Affiliations
Christopher L. McAdams, Univ. of Texas/Austin (United States)
Lewis W. Flanagin, Univ. of Texas/Austin (United States)
Clifford L. Henderson, Univ. of Texas/Austin (United States)
Adam R. Pawlowski, Univ. of Texas/Austin (United States)
Pavlos C. Tsiartas, Univ. of Texas/Austin (United States)
C. Grant Willson, Univ. of Texas/Austin (United States)

Published in SPIE Proceedings Vol. 3333:
Advances in Resist Technology and Processing XV
Will Conley, Editor(s)

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