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Proceedings Paper

Excimer formation using low-energy electron-beam excitation
Author(s): Andreas Ulrich; Jochen Wieser; Daniel E. Murnick
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Paper Abstract

Excimer formation in dense gas targets is studied using a 10 to 20 keV electron beam for the excitation of rare gases. A SiNx ceramic foil, only 300 nm thick but strong and completely vacuum tight is used as an entrance window. The electrons loose only 4 to 6% of their energy in this foil. The low electron energy allows a table top setup without high voltage or x-ray radiation hazards. First applications of the system for excimer physics research and the development of novel vacuum ultraviolet light sources are described.

Paper Details

Date Published: 29 June 1998
PDF: 8 pages
Proc. SPIE 3403, International Conference on Atomic and Molecular Pulsed Lasers II, (29 June 1998); doi: 10.1117/12.311957
Show Author Affiliations
Andreas Ulrich, Technische Univ. Muenchen (Germany)
Jochen Wieser, Technische Univ. Muenchen (Germany)
Daniel E. Murnick, Rutgers Univ. (United States)


Published in SPIE Proceedings Vol. 3403:
International Conference on Atomic and Molecular Pulsed Lasers II
Victor F. Tarasenko; Georgy V. Mayer; Gueorgii G. Petrash, Editor(s)

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