Proceedings PaperTwo-dimensional micro-optical scanner excited by PZT thin-film microactuator
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A silicon micromachined resonance type 2D micro optical scanner has been developed for miniaturization of optical scanning sensors such as a bar-code reader, a laser range finder, a shape recognition sensor and so on. A PZT thin film microactuator is adopted to the actuator of the micro scanner in order to miniaturize the actuator and decrease the operation voltage. The scanner, 2mm X 4mm in size, consisting of a resonator with two degrees of freedom and a PZT thin film microactuator for excitation of the resonator and the strain detector for scanning position detection is capable of 2D optical scanning with wide scanning angle at low applied voltage and detection of the scanning position. A miniature scanning image sensor and a range sensor could be realized using the micro scanner.