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Proceedings Paper

Surface micromachined devices for microwave and photonic applications
Author(s): M. Frank Chang; Ming C. Wu; JeyHsin Yao; M. Edward Motamedi
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Paper Abstract

As an enabling technology, Micro Electro Mechanical Systems (MEMS) have continuously provided new and improved design/implementation paradigms for a variety of scientific and engineering applications. In this paper, we review recent advances made in MEMS and its derivative MOEM devices for both microwave and photonic applications.

Paper Details

Date Published: 22 June 1998
PDF: 0 pages
Proc. SPIE 3419, Optoelectronic Materials and Devices, 34190S (22 June 1998); doi: 10.1117/12.311012
Show Author Affiliations
M. Frank Chang, Univ. of California/Los Angeles (United States)
Ming C. Wu, Univ. of California/Los Angeles (United States)
JeyHsin Yao, Rockwell Science Ctr. (United States)
M. Edward Motamedi, Rockwell Science Ctr. (United States)

Published in SPIE Proceedings Vol. 3419:
Optoelectronic Materials and Devices
Marek Osinski; Yan-Kuin Su, Editor(s)

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