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Proceedings Paper

Nonlinear photon-stimulated desorption from an oxidized tungsten surface
Author(s): David P. Taylor; Henry Helvajian
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Paper Abstract

The results of a study of the laser Photon Stimulated Desorption (PSD) from an oxidized tungsten surface using 248 nm light are reported. The tungsten oxide system was chosen as a prototype for stimulated desorption resulting from the laser interaction with an oxide covered metal surface. The desorption yield, laser fluence dependence, and behavior of tungsten, tungsten oxide and other desorbed cations (including alkali atoms) have been used to probe aspects of the energetics under different conditions of oxygen dosage and laser exposure history. It is interesting to compare the nonlinear laser PSD results with the Electron Stimulated Desorption results which have appeared in the literature.

Paper Details

Date Published: 3 June 1998
PDF: 9 pages
Proc. SPIE 3274, Laser Applications in Microelectronic and Optoelectronic Manufacturing III, (3 June 1998); doi: 10.1117/12.309519
Show Author Affiliations
David P. Taylor, The Aerospace Corp. (United States)
Henry Helvajian, The Aerospace Corp. (United States)


Published in SPIE Proceedings Vol. 3274:
Laser Applications in Microelectronic and Optoelectronic Manufacturing III
Jan J. Dubowski; Peter E. Dyer, Editor(s)

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